By Isao Yamada
Materials Processing by way of Cluster Ion Beams: historical past, know-how, and Applications discusses the modern physics, fabrics technological know-how, floor engineering matters, and nanotechnology services of cluster beam processing.
Written by means of the originator of the gasoline cluster ion beam (GCIB) notion, this book:
- Offers an summary of ion beam applied sciences, from the invention of monomer ions to the creation of GCIBs
- Explores the improvement of assets for generating cluster beams from good materials
- Describes the engineering features of fuel cluster ion beam equipment
- Covers cluster ion-solid floor interplay kinetics in addition to sputtering, implantation, and ion-assisted deposition
- Details floor processing strategies for smoothing, shallow implantation, and guidance of top quality skinny films
- Introduces consultant examples of rising GCIB commercial applications
Materials Processing by means of Cluster Ion Beams: background, expertise, and functions provides a deeper realizing of the significance of cluster ion beams and their applications.
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